儀器名稱 (Facility name)

離子束研磨拋光系統

Triple ion-beam milling system

規格與功能（Specifications and functions）

1. 型號 (Model)：Leica EM TIC 3X
2. 離子源 (Ion sources)：三支單體可獨立控制式離子槍 (Three independently controlled ion guns)
3. 離子源功率(Ion beam power): 1 to 10 keV。
4. 離子源電流(Ion beam current): 0.5 to 4.5 mA
5. 離子束直徑 (FWHM of ion beam): 0.8 to 2.5 mm
6. 橫截面研磨速率 (Cross sectional milling rate)： average rate of 300 μm/hour @ 10 KeV for Si
7. 最大樣品尺寸(橫截面) (Maxium size of cross section samples)：40 mm x 40 mm x 10 mm (t)
8. 研磨範圍(橫截面) (Milling range of cross section samples)：1 mm in depth (max.) and 4 mm in width (max.)
9. 最大樣品尺寸(平面拋光) (Maxium size of planer samples)：35 mm in diameter/10mm in height
10. 研磨範圍(平面拋光) (Milling range of planer samples)：25 mm in diameter (max.)
11. 使用氣體 (gas): Ar (99.999 % purity)
12. 真空系統(Vacuum system)：Oil-free, <1x10-5 mbar

使用規定與注意事項 (Rules and notices)

1. 進行橫截面離子切割與拋光之試片表面需用大於1,000號之砂紙將試片表面磨平。

Cross-sectional samples have to be ground by SiC grinding paper (#1000) to a flat surface prior to ion milling.

2. 進行平面拋光之試片表面先需用標準機械研磨拋光(mechanical polishing)方式完成表面拋光。

Samples have to be polished mechanically by SiC grinding papers and Al₂O₃ powders according to the standard metallographic procedures prior to planar milling.   

3. 離子切割與拋光過程試片溫度可能上升，最高溫度通常低於70^oC。

Sample temperature may raise to as high as 70 ^oC during ion bombardment.

收費標準(Service charge)

委託操作(廠商) (Operator service (Non-academic organization))

(1) 橫截面試片離子切割 (cross sectional milling)

2 hrs or below : 1000 NTD/piece

2-3 hrs      : 1,250 NTD/piece

3-4 hrs      : 1,500 NTD/piece

4-6 hrs      : 2,000 NTD/piece

2. 平面拋光(planar milling): 1,000 NTD/piece

委託操作(外校) (Operator service (Academic organization))

(1) 橫截面試片離子切割 (cross sectional milling)

2 hrs or below : 800 NTD/piece

2-3 hrs      : 1,000 NTD/piece

3-4 hrs      : 1,200 NTD/piece

4-6 hrs      : 1,600 NTD/piece

2. 平面拋光(planar milling): 800 NTD/piece

委託操作(本校) (Operator service (NSYSU))

(1) 橫截面試片離子切割 (cross sectional milling)

2 hrs or below : 600 NTD/piece

2-3 hrs      : 750 NTD/piece

3-4 hrs      : 900 NTD/piece

4-6 hrs      : 1,200 NTD/piece

(2)平面拋光(planar milling): 600 NTD/piece

自行操作(本系) (Self-operation)

(1) 橫截面試片離子切割 (cross sectional milling)

2 hrs or below : 500 NTD/piece

2-3 hrs      : 600 NTD/piece

3-4 hrs      : 750 NTD/piece

4-6 hrs      : 1,000 NTD/piece

(2)平面拋光(planar milling): 500 NTD/piece

聯絡方式 (Contact information)

儀器指導教授 (Professor in-charge)：張六文教授 (Professor Liuwen Chang)

操作人員與聯絡人 (Operator)：顏采蓉 (Ms  Yen)/ 楊國裕 (Mr. K-Y Yang)

聯絡電話(Tel)：07-5252000 #4085/07-5252000 #4087

電子信箱(e-mail)：judyyen123@staff.nsysu.edu.tw/ kuoyu@mail.nsysu.edu.tw

儀器地點(Location)：材料大樓三樓3021室 (Room工MS3021)

開放時間 (Opening hours)

週一至週五 早上8：30至下午5：30

8:30 AM – 5:30 PM, Monday through Friday